tool coating process vacuum coating equipment pvd coating machine

vacuum ion coating machine
1.Roots pump ZJP-300,diffusion pump KT-500
2.leak rate:<=0.35Pa/h
3.rotation speed:0-5 turn/min
A-Computer automatic control B-switch board manual
Specification and model
LD-620A/B
LD-820A/B
LD-1020A/B
Vacuum Chamber Inner Size
¢800-900×h800-900(mm)
¢900-1000×h900-1000(mm)
¢1000-1200×h1000-1200(mm)
Effective coating space
¢700-800×h600-700(mm)
¢800-900×h700-800(mm)
¢900-1100×h800-1000(mm)
Workpiece revolution hanger
Rotation + revolution and rotation
Rotation + revolution and rotation
Rotation + revolution and rotation
The decorate mode of rotary hanger
The top of Vacuum Chamber downward install
The top of Vacuum Chamber downward install
The top of Vacuum Chamber downward install
Hanger quantity
4 rotation+8 revolution and rotation
4 rotation +8 revolution and rotation
4 rotation +8 revolution and rotation
Rotary speed
0-5revolutions/minuterotationspeed governor adjust
0-5revolutions/minuterotationspeed governor adjust
0-5revolutions/minuterotationspeed governor adjust
The maximum workpiece can coat
¢150-170×h550-650(mm)rotatin
¢170-180×h650-750(mm)rotatin
¢180-200×h750-950(mm)rotatin
Application
Tools coating +Decorative coating
Tools coating+ Decorative coating
Tools coating+ Decorative coating
Workpiece kinds
Metal,glass,ceramics,plasticsetc.
Metal,glass,ceramics,plasticsetc.
Metal,glass,ceramics,plasticsetc.
Film kinds
TiN, TiAlN ,CrN ,TiC, TiCN ,etc.
TiN, TiAlN, CrN ,TiC, TiCN ,etc.
TiN ,TiAlN ,CrN, TiC ,TiCN ,etc.
Requirement of manufacture place
5×7m
7×8m
8×8m
Requirement of capacitance
50Hz 380V 60KVA
50Hz 380V 70KVA
50Hz 380V 80KVA
Requirement of cooling water
3ton/hour recirculated water/ 25
3ton/hour recirculated water/ 25
3ton/hour recirculated water/ 25
Pollutant discharge
none
none
none
Work noise
≤90decibel
≤90decibel
≤90decibel
Vacuum air pump
2X-70rough pump+2X-30maintain pump
2X-70rough pump+2X-30maintain pump
2X-70rough pump+2X-30maintain pump
Roots pump
ZJP-150
ZJP-150
ZJP-300
Diffusion pump
KT-400
KT-400
KT-500
Ultimate vacuum
Overmatch 6×10
-4
Pa
Overmatch 6×10
-4
Pa
Overmatch 6×10
-4
Pa
Work vacuum
6.67×10
-3
Pa
6.67×10
-3
Pa
6.67×10
-3
Pa
Exhaust speed
<20 minutes(atmospherework vacuum)
<20minutes(atmospherework vacuum)
<20minutes(atmospherework vacuum)
Pressure rising rate(leak rate)
≤0.35Pa/h
≤0.35Pa/h
≤0.35Pa/h
Vacuum chamber material
304 SS
304 SS
304 SS
Cathode voltaic arc ion source
6 dynamoelectric striking the arc indirect cooling
8 dynamoelectric striking the arc indirect cooling
10dynamoelectric striking the arc indirect cooling
Target size
¢100×40(mm)
¢100×40(mm)
¢100×40(mm)
Sputtering target size
w100-150×h600-700(mm)
w100-150×h700-800(mm)
w100-150×h800-1000(mm)
Grid bias power supply
20KW 20KHz Inverterd power supply
30KW 20KHz Inverterd power supply
35KW 20KHz Inverterd power supply
magnetron sputtering power supply
25KW 40KHz intermediate frequency pulse power source
30KW 40KHz intermediate frequency pulse power source
35KW 40KHz intermediate frequency pulse power source
Voltaic arc power supply
6 0-200A electric current tunableness
8 0-200A electric current tunableness
10 0-200A electric current tunableness
Vacuum chamber heating power
15-18KW temperature PID adjust
18KW temperature PID adjust
18KW temperature PID adjust
Control model
Automatic(A)
Manually operation(B)
Automatic(A)
Manually operation(B)
Automatic(A)
Manually operation(B)
Autocontrol arrangement (A)
Industry control computer+PLD+LCD+printer
Industry control computer+PLD+LCD+printer
Industry control computer+PLD+LCD+printer